Module Services

 

pad dressing part/ Polishing Motor/ Flow Controller parts Repair/Overhaul Services

To alleivate our customer’s concerns of tool downtime without availability of common parts like pad dressing bearing/ass, rotation motor, polising head motor, drivers etc, we do have our repaired/refurbished stocks that we have tested thoroughly  on standby to resolved the common worries of CMP end-users’ have on harddown problems without parts.