Customise global and local Slurry CDM for batch of CMP tools

With our vast experience being end-user ourself, we understand some of the challenges that end-user face on the tedious efforts involve in slurry selection, marathon testing, both local and global, mixing, agitation requirement of some of the demanding slurry like ceria slurry. We are capable to propose customise slurry CDM build to meet individual slurry CDM blending, mixing and agitation needs. Following are some example of one of our slurry CDM that we had built for our customer.